About: http://webisa.webdatacommons.org/215256212

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The implanted contact regions 38 may be formed, for example, by implantation of acceptor ions, such as boron and/or aluminum, to produce regions 38 having a dopant density of about 1??1020 cm???3.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com