About: http://webisa.webdatacommons.org/21554493

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, there is a need for a method and an apparatus that avoids the prior art by enabling optimized fluid management and application to a wafer that enables the application of a ALD in a highly controllable and efficient manner.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com