About: http://webisa.webdatacommons.org/216052225

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The protective film 1009 can be formed by using an insulating film including a carbon film, a silicon nitride film, or a silicon nitride oxide film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com