About: http://webisa.webdatacommons.org/230869876

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The dielectric layers 410, 412, 414 and 415 can all be deposited using suitable chemical vapor deposition, sputtering, or other known processes for depositing these materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com