About: http://webisa.webdatacommons.org/232563248

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A semiconductor device wherein an amorphous Ta2O5 thin film having double bond (Ta???O) of Ta with O (oxygen) which is formed on a semiconductor substrate is a capacitative insulating film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com