About: http://webisa.webdatacommons.org/233213747

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, RIE was carried out in several times to cover regions except a surface of the p-side contact layer with the insulating film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com