About: http://webisa.webdatacommons.org/235730100

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In general, openings such as through holes, channels, etc. need not be formed in the lid wafer prior to its assembly to the device wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com