About: http://webisa.webdatacommons.org/236259400

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Ring 78 is formed of an insulating material such as an ethylene tetrafluoride resin so as to generate a plasma of a diameter substantially the same as that of an object to be etched, e.g., semiconductor substrate 12.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es