About: http://webisa.webdatacommons.org/247857080

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 36A is a plan view during the fabrication process of the photomask shown in FIG. 30.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com