About: http://webisa.webdatacommons.org/252290318

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The surface (opposite to the movable portion) of the platen 2010 is an air-bearing running surface of the movable portion 2020, and hence required to have high surface accuracy.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com