| http://www.w3.org/ns/prov#value | - FIG. 4B is a schematic top plan view of the reactor 110 of FIG. 4A taken along line A???A. In one aspect of this embodiment, the apertures 166 are arranged in the gas distributor 160 generally uniformly about the workpiece W. The apertures 166 are oriented to flow the gases from a perimeter region toward the center C of the workpiece W. For example, a first aperture 166 a is configured to flow a g
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