| http://www.w3.org/ns/prov#value | - BRIEF DESCRIPTION OF THE DRAWINGS [0013]FIG. 1 is a schematic cross-sectional side view of a polishing station from a chemical mechanical polishing system. [0014]FIG. 2 is a schematic cross-sectional side view of a polishing pad having an antireflective coating on a bottom surface of the window. [0015]FIG. 3 is a schematic cross-sectional side view of a polishing pad in which the window is recesse
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