About: http://webisa.webdatacommons.org/258436084

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 51A is a flow chart illustrating the lithography sub-process which forms the core of the wafer processing process in FIG. 50.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com