About: http://webisa.webdatacommons.org/261906489

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This invention relates to measurement and inspection systems and particularly to systems and methods for measuring or inspecting specific locations on a wafer while the wafer remains in a processing apparatus.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com