| http://www.w3.org/ns/prov#value | - nsulation film and the second insulation film are inscribed on the surface such as a cap film, an etch stop film and a hard mask film respectively, in accordance with each role.The insulation barrier layer 406 is made of a layer of organic substance, a layer including silicon, carbon and organic substance, a layer of organic substance including Si--O binding, a layer of organic substance including
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