About: http://webisa.webdatacommons.org/26585234

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	inert gasUS748534925 oct. 20063 f???vr. 2009Asm Genitech Korea Ltd.Thin film forming methodUS748954525 juil. 200610 f???vr. 2009Micron Technology, Inc.Memory utilizing oxide-nitride nanolaminatesUS749143014 juil. 200517 f???vr. 2009Tokyo Electron LimitedDeposition method for forming a film including metal, nitrogen and carbonUS749163428 avr. 200617 f???vr. 2009Asm International N.V.Methods for fo
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