| http://www.w3.org/ns/prov#value | - An effusion cell, arranged in controllable flow communication with the deposition chamber, is also provided and contains an organometallic reagent including all the constituent atoms of a desireddeposition film product and a predetermined number of bonds per reagent metal atom that is desired to have remain intact in the final deposition product, such number being at least as high in value as the
|
