| http://www.w3.org/ns/prov#value | - FIG. 1A is a top view which shows an EL module, and FIG. 1B is a sectional view cut along the line of A???A??? of FIG. 1A. In FIG. 1B, a film substrate 10 a (for example, a plastic substrate) having flexibility on which surface, disposed is a lamination layer of a layer 10 b which functions as a barrier film and is represented by AlNxOy (called also as an AlNxOy film) and a stress relaxation film
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