About: http://webisa.webdatacommons.org/269311809

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	One example of such material is a polyimide, and may be the same type of polyimide as used to passivate the side walls 220.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com