About: http://webisa.webdatacommons.org/269339047

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the above-described doping, the conditions except the dose amount is set to the same as the conditions at the time of doping to the processing object analyzed by an analysis method such as SIMS analysis.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com