| http://www.w3.org/ns/prov#value | - BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic side view of a system for mask projection and inspection, in accordance with an embodiment of the present invention; FIG. 2 is a flow chart that schematically illustrates a method for calibrating an optical projection system in terms of a set of expansion functions, in accordance with an embodiment of the present invention; FIG. 3 is a schema
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