About: http://webisa.webdatacommons.org/273023554

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The exemplary test system 100 shown in FIG. 6 is a system for probing dies of an unsingulated semiconductor wafer in which contactless communications of test and response data is achieved by electromagnetic coupling as described above.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com