| http://www.w3.org/ns/prov#value | - BRIEF DESCRIPTION OF THE DRAWINGS [0042]FIG. 1 is a schematic side view of a system for optical inspection, in accordance with a preferred embodiment of the present invention; [0043]FIG. 2A is a schematic, pictorial illustration showing incidence of a laser beam on a substrate; [0044]FIGS. 2B and 2C are schematic, pictorial illustrations showing typical patterns of scattered radiation due to incid
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