| http://www.w3.org/ns/prov#value | - ictive elements 18 a and 18 b, and by implementing the film forming method such as sputtering, CVD or laser ablation (implementing twice because of both surfaces). [0087] Each of the piezoelectric/electrostrictive elements 18 a and 18 b comprises filmy piezoelectric/electrostrictive layers 22 composed of four layers, and a pair of electrodes 24 and 26 formed on both surfaces of each piezoelectric/
|
