| http://www.w3.org/ns/prov#value | - BRIEF DESCRIPTION OF THE DRAWINGS [0011]FIG. 1 is a cross-sectional side view of an illustrative elementary cell, with a diaphragm positioned adjacent a first wall; [0012]FIG. 2 is a cross-sectional side view of the illustrative elementary cell of FIG. 1 with the diaphragm deformed and positioned adjacent a second opposite wall; [0013]FIG. 3 is a partial cross-sectional top view of an illustrative
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