About: http://webisa.webdatacommons.org/276265077

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The features that are extracted in step 156 may include any of the features described above such as lateral dimension, shape, location, and proximity on the reticle to other features or defects.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com