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About:
http://webisa.webdatacommons.org/27764415
Property
Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value
Stress inducing isolation material adjacent selected sides of the source and drain regions imparts stress, i.e. tension or compression, beyond the source and drain regions of the substrate at least into the channel region.
http://www.w3.org/ns/prov#wasQuotedFrom
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