| http://www.w3.org/ns/prov#value | - It can be formed by combining the same method or different kinds of methods, such as co-evaporation by resistance heating evaporation, co-evaporation by electronic beam evaporation, co-evaporation by resistance heating evaporation and electronic beam evaporation, film formation by resistance heating evaporation and sputtering, or film formation by electronic beam evaporation and sputtering.
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