| http://www.w3.org/ns/prov#value | - ry charged particle image of said surface; and positive ion beam irradiation means which irradiates a positive ion beam to the surface of said sample including an area to which said focused charged particle beam is irradiated; and a diffusion means which diffuses an electric charge to the earth, said electric charge is caused by said irradiation of said charged particle beam and said electric char
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