About: http://webisa.webdatacommons.org/297261530

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The latter depend in turn on O/N implant conditions such as beam current density, doping level, temperature and energy.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com