About: http://webisa.webdatacommons.org/297589956

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The formation of thin film layers by PVD includes such processes as sputtering, evaporation and molecular beam epitaxy.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com