About: http://webisa.webdatacommons.org/299266430

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, wavelengths in the extreme ultraviolet or soft x-ray range, such as in the 1 nm to 70 nm range, have not beenwidely used in commercial applications.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com