About: http://webisa.webdatacommons.org/300945325

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 12 is an apparatus for performing attenuating phase shift calibration using a lithographic stepper.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com