About: http://webisa.webdatacommons.org/301380353

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferred working wavelengths are those of lasers, especially excimer lasers, such as the ArF excimer laser, also 193 nm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com