| http://www.w3.org/ns/prov#value | - The present invention relates to a processing method using an optical beam such as a laser beam and an energy beam such as of a charged particle, and a processing apparatus, utilizing the beam, more particularly, to a processing method for processing objects such as a resin, ceramic, metal and photolithographic photosensitive layer to drilling, half-etching, surface treatment and exposure to a pho
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