| http://www.w3.org/ns/prov#value | - This focus position is a condition that satisfies equation (22), and that focus position can be determined experimentally or by simulation.Using the relationship in equation (21), we derive.times. ##EQU00006## from equation (20), which gives the optimum control condition for the aberration control coil 52.In the present embodiment, the excitation condition for the focusing lens 6 is set such that
|
