| http://www.w3.org/ns/prov#value | - That is, in the manufacturing method according to this embodiment, tact is improved to 250%. [0241] Thereafter, similarly to the embodiment 1-1, in sixth step, the reflective electrode 2 is formed by a forming process such as sputtering, and then patterned by photolithography. [0242] The reflective electrode 2 formed through the first to sixth steps has concave/convex shape along a plurality of st
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