About: http://webisa.webdatacommons.org/308752672

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this way, it is possible to remove impurities such as carbon or OH that are bonded to and contained in the thin film in units of atomic layers, and to solve the problem that there is a lack of oxygen in the aluminum oxide film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com