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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A metal thin film, such as Al, having a thickness of several hundred .ANG. is formed by vacuum deposition on the phosphor on which filming was performed, and is employed as a metal back 11 (FIG. 2D).
http://www.w3.org/ns/prov#wasQuotedFrom	docstoc.com