About: http://webisa.webdatacommons.org/313900117

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In an embodiment of the present invention, gate electrode 212 is formed utilizing a low temperature less than 500??? C. and preferably less than 350??? C., process such as sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com