About: http://webisa.webdatacommons.org/314633175

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In step 48 (etching), portions except for the developed resist image are etched away.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com