About: http://webisa.webdatacommons.org/315992298

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	layer is a semiconductor material; forming at least one vent in the first encapsulation layer; forming the chamber; and depositing a
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca