About: http://webisa.webdatacommons.org/31651255

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	According to the sixth embodiment, by making the lower electrode 2 n smaller, it is possible to overcome problems such as a short circuit between different lower electrodes 2 n, in the manufacturing process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com