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http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	News & Analysis 7/31/2006 Post a commentDespite the hype for immersion lithography, the ramp for the technology is expected to be slower-than-expected due to high costs and other factors, according to Gartner Inc.
http://www.w3.org/ns/prov#wasQuotedFrom	eetimes.com