About: http://webisa.webdatacommons.org/327063950

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then, the piezoelectric disc 13 having a uniform thickness is formed on the electrode pattern 14, covering neither the terminal 91 nor the terminal 92, by means of thing-film forming process such as sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com