About: http://webisa.webdatacommons.org/327628321

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Materials other than polycrystalline silicon, for example, insulators such as SiO2 and Si3 N4 or polymeric materials, may be employed for filling up the grooves.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com