About: http://webisa.webdatacommons.org/330979318

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIG. 3, a first layer 30 of insulating (oxide) material, such as SiO2, is deposited, followed by provision of a second oxide layer 32.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com