About: http://webisa.webdatacommons.org/33391347

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 13A is a top plan view of a fifth embodiment of a microvalve device according to this invention partly broken away to show the microvalve device in a first position.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au