About: http://webisa.webdatacommons.org/335424345

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As noted above, insulating materials such as BPSG, are not readily receptive to nitride nucleation compared to conductive materials such as conductive metals and semiconductive materials such as HSG silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com