About: http://webisa.webdatacommons.org/340882757

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Sealing ring 12 is made of insulating material such as ethylene tetrafluoride resin in such a way that plasma can be generated to have substantially same radius as that of a substrate or semiconductor wafer etched.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com